Micromech Systems Projects - Miniature sub-micron stages used on beamline analysis

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Miniature sub-micron stages used on beamline analysis

Application
The requirement to fit up to nine miniature positioning stages into a very confined volume with positioning resolution of 0.1 microns. Some stages to have a practical move velocity of 10mm per second or faster.

Scope of overall contract.
To propose and supply three sets of nine stages with defined performance and control compatibility to the customer’s electrical standards.

Description of equipment and services supplied.
The application solution was provided by specifying a combination of miniature ‘PiezoLegs’ walking-beam driven cross – roller RTP type stages from PM Bearings Holland together with three slightly larger miniature stepper / screw-driven cross – roller stages from Parker Daedal USA. Some stages were mounted in combinations of vertical and ‘edge-on’ horizontal. All stages were built with Renishaw 0.1 Micron Linear encoders.